SOI wafers, bonded substrates and silicon, made and stocked in Sunnyvale.

We fabricate SOI wafers with ultra-uniform device layers and ultra-low stress, build custom bonded structures, and keep a working inventory of SOI, CZ and float zone wafers.

Device layer
100 nm – 200 µm
Buried oxide
up to 15 µm
Handle wafer
from 100 µm
A polished silicon wafer held up to the light
±0.1 µm

device layer uniformity, with any resistivity, orientation and thickness

Ultra-flat SOI, without Smart Cut

We have made a major technological breakthrough in making ultra-flat SOI wafers: as uniform as ±0.1 µm with any resistivity, orientation and thickness, greatly surpassing the limitations of Smart Cut technology.

We now produce 0.5 µm device layers with heavy doping, and SOI wafers with a 1.0 ± 0.10 µm device layer. Traditionally this needed a complicated Smart Cut plus epi growth process, at significantly higher cost.

SOI wafer specifications and stock →

What we make

Buy from inventory when a lot fits. Everything else is built to your specification.

SOI wafers

Bonded SOI with device layers from 100 nm to 200 µm, thermal or CVD buried oxide, and handles as thin as 100 µm.

Silicon & FZ wafers

CZ and float zone silicon, plus silicon germanium, sapphire, compound, epitaxial, film-coated, glass and quartz wafers.

Advanced substrates

Low-temperature bonding for silicon on glass, sapphire and quartz; III-V, GaN and PZT on silicon; GaN on diamond. Debondable SOI, ultra-thin and ultra-flat silicon.

Wafer foundry service

Thin films, photolithography, plating, etching, bonding, dicing, grinding and CMP, from single steps to prototype runs. Interposers and through-via silicon and glass wafers.

In stock now

Every lot listed is on our shelves. Priced wafers can be requested online; SOI lots are quoted with your request.

See all 174 lots →
SOI Wafers 81 lots 431 wafers · 3″ 4″ 6″ 8″ · quoted per order Shop SOI inventory →
CZ Silicon Wafers 84 lots 25,419 wafers · 6″ 8″ 12″ · from $4.35 Shop CZ Silicon inventory →
Float Zone Wafers 9 lots 735 wafers · 4″ 5″ 6″ · from $35.00 Shop FZ inventory →

Talk to the people who make the wafers.

Telephone
408-921-6679
Email
sales@memsengineering.com
Address
1159 Sonora Ct, Sunnyvale, CA 94086