MEMS Engineering and Material, Inc is a leading provider of SOI wafers (silicon on insulator). MEMS Engineering & Material specializes in fabricating SOI wafers, customized bonding structures and silicon wafers. With over decades of research and development, we have developed proprietary technology that allow us to supply SOI wafers with ultra uniform device and ultra low stress.

We supply SOI wafers with the most comprehensive specifications on the market.

  • Device layer: 100 nm to 200 micro device thickness with uniformity of +/-0.01 micro, +/-0.15 micro, +/-0.5 micro for different applications.
  • Buried Oxide: Up to 15 micro oxide with options for thermal and CVD oxide.
  • Handle wafers: As thin as 100 micro.

General Products

SOI wafers SOI Wafers Inventory Listing Customization
Silicon wafers Silicon Wafers Inventory Listing Customization
FZ wafers FZ Wafers Inventory Listing Customization

Advanced Products

Ultra Uniform SOI Wafers Ultra-flat Silicon Wafers Ultra-Thin Silicon Wafers
Silicon-On-Glass Debondable SOI Wafers

Emerging Technology

Interposer and through via Silicon/Glass wafer

Contact Information

Telephone
408-921-6679
Fax
408-730-4539
email
sales@memsengineering.com
Address
1159 Sonora Ct
Sunnyvale, CA 94086